Spatial phase-shifting interferometry with compensation of geometric errors based on genetic algorithm
نویسندگان
چکیده
We propose a novel spatial phase-shifting interferometry that exploits a genetic algorithm to compensate for geometric errors. Spatial phase-shifting interferometry is more suitable for measuring objects with properties that change rapidly in time than the temporal phase-shifting interferometry. However, it is more susceptible to the geometric errors since the positions at which interferograms are collected are different. In this letter, we propose a spatial phase-shifting interferometry with separate paths for object and reference waves. Also, the object wave estimate is parameterized in terms of geometric errors, and the error is compensated by using a genetic algorithm. OCIS codes: 070.2580, 090.1760, 230.6120. doi: 10.3788/COL20090712.1113.
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